Amorphous carbon film deposition on the inner surface of tubes using atmospheric pressure pulsed filamentary plasma source

Ramasamy Pothiraja, Nikita Bibinov, Peter Awakowicz

JOURNAL OF PHYSICS D-APPLIED PHYSICS, Volume: 44, Issue: 35, Article Number: 355206, DOI: 10.1088/0022-3727/44/35/355206, Published: SEP 7 2011


Abstract

Uniform amorphous carbon film is deposited on the inner surface of quartz tubes having an inner diameter of 6 mm and an outer diameter of 8 mm. A pulsed filamentary plasma source is used for the deposition. Long plasma filaments (similar to 140 mm) are generated inside the tube in argon with methane admixture. FTIR-ATR, XRD, scanning electron microscope, laser scanning microscope and XPS analyses give the conclusion that deposited film is amorphous composed of non-hydrogenated sp(2) carbon and hydrogenated sp(3) carbon. Plasma is characterized using optical emission spectroscopy, voltage-current measurement, microphotography and numerical simulation. On the basis of observed plasma parameters, the kinetics of the film deposition process is discussed.

Tags: plasma