Investigation of Interactions between Plasmas and RF-Diagnostics: Challenges of Complex 3D-Electromagnetic Field Simulations

Christian Schulz, Ilona Rolfes

Antennas and Propagation Society International Symposium (APSURSI), pp. 2181-2182, DOI: 10.1109/APS.2013.6711749, Orlando, Florida, USA, July 7-13, 2013


3D-electromagnetic field simulations are an indispensable tool for a cost-effective development and characterization of novel radio frequency systems for plasma diagnostic. This contribution investigates the challenges, simulations have to cope with for a realistic modeling of interactions between probe and plasma. Using the Drude model, a plasma can be described as a dielectric material by its plasma electron frequency and collision frequency. This yields numerous variations of modeled plasmas, showing the resulting interaction processes. A comparison of simulation and measurement shows an excellent agreement, demonstrating the suitability of the presented simulation model.


Tags: Plasmas, RF-Diagnostics