Process Diagnostics and Monitoring Using the Multipole Resonance Probe (MRP)

Jens Harhausen, Peter Awakowicz, Ralf Peter Brinkmann, Rüdiger Foest, Martin Lapke, Thomas Musch, Thomas Mussenbrock, Jens Oberrath, Andreas Ohl, Ilona Rolfes, Christian Schulz, Robert Storch, Tim Styrnoll

64th Annual Gaseous Electronics Conference 2011, Salt Lake City, Utah, USA, Nov 14-18, 2011

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