Pulsed high-power plasmas for deposition of nanostructured thin films

Peter Awakowicz, Uwe Czarnetzki

JOURNAL OF PHYSICS D-APPLIED PHYSICS, Volume: 46, Issue: 8, Article Number: 080301, DOI: 10.1088/0022-3727/46/8/080301, Published: FEB 27 2013

Tags: plasma