The Multiple Resonance Probe: A Novel Device for Industry Compatible Plasma Diagnostics

Ralf Peter Brinkmann, Robert Storch, Martin Lapke, Jens Oberrath, Christian Schulz, Tim Styrnoll, Christian Zietz, Peter Awakowicz, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes

65th Annual Gaseous Electronics Conference 2012 , Vol. 57, No. 8 , Austin, Texas, USA, Oct 22–26, 2012

Tags: Multiple-Resonance-Probe, Plasmas