Electron density measurements in technological plasmas using the Multipole Resonance Probe

Tim Styrnoll, Martin Lapke, Christian Schulz, Robert Storch, Jens Oberrath, Thomas Musch, Ilona Rolfes, Peter Awakowicz, Thomas Mussenbrock, Ralf Peter Brinkmann

63rd Annual Ga­se­ous Elec­tro­nics Con­fe­rence 2010, Paris, Fran­ce, Oc­to­ber 4-8, 2010

Tags: density measurements, multipole resonance probe, technological plasmas