Electron Heating in Voltage and Current Driven Asymmetric Capacitive RF Discharges

Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Donkó, Zoltán, Thomas Mussenbrock

21st Symposium on Application of Plasma Processes (SAPP) 13-18 January 2017, Štrbské Pleso, Slovakia

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