A global model of a dual frequency capacitive discharge considering the nonlinearity of the sheath and a bulk-chemestry

Philipp Mertmann, Thomas Mussenbrock, Ralf Peter Brinkmann, Peter Awakowicz

Welt­PP-10. Kerk­ra­de, The Nether­lands, 15-16 No­vem­ber

Tags: global model, nonlinear, Sheath