Global Modeling of Cylindrical Surface-wave discharges: Argon or Oxygen

Efe Kemaneci, Ralf Peter Brinkmann

ICOPS 2016, Banff, Alberta, Canada, June 19-23 2016


Abstract

Surface wave-discharges are often used for a variety of technological purposes mostly due to their stability and efficacy for a wide range of operation parameters. They are associated with a large ratio of axial to radial dimension compared to other types of plasma sources and this allows them to cover relatively larger areas. In order to probe the underlying physical principals, a variety of detailed modeling approaches are already developed 1,2 , however, much less attention is paid on computationally efficient global models 3,4 . In this contribution, a self-consistent global modeling approach is developed and implemented on a variety of cylindrical surface-wave discharges operated in oxygen or argon. The simulation results are compared with a variety of measurements on surfatron and coaxial plasma-line and an agreement is obtained.

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