Global (volume-averaged) model of oxygen plasmas

Efe Kemaneci, J van Dijk, Thomas Mussenbrock, Ralf Peter Brinkmann

22nd International Symposium on Plasma Chemistry July 5-10, 2015; Antwerp, Belgium


Abstract

In this contribution, we investigate oxygen plasmas using a global (volumeaveraged) model. The investigation mainly focuses on the population of the vibrational quantum levels of oxygen molecule in radio-frequency plasmas, where a ladder-like dissociation is included in addition to the various e-V, V-V and V-T transitions. The plasma interactions with the wall, such as recombination of oxygen atom and ozone formation, are also investigated. Furthermore, we cover both the continuous and pulsed power input modes, where we observe agreement with various experimental data of oxygen plasmas in literature.

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