High Frequency behaviour of dual frequency capacitively coupled plasmas

Egmont Semmler, Peter Awakowicz, Dennis Ziegler, Thomas Mussenbrock, Ralf Peter Brinkmann

28th Int. Con­fe­rence on Phe­no­me­na in Io­ni­zed Gases ICPIG, Pra­gue, Czech Re­pu­blic, 15-20 Juli

Tags: dual frequency, high frequency