Influence of frequency and relative phase effects in dual frequency capacitive discharges on thin film deposition behavior

Egmont Semmler, Dennis Ziegler, Thomas Mussenbrock, D. O' Connel, Timo Gans, Peter Awakowicz, Achim von Keudell, Ralf Peter Brinkmann

2nd Workshop on Radio-Frequency Discharges, La Badine - Presquile de Giens, France (2009)

Tags: frequency and relative phase, thin film deposition behavior