Introduction of an iterative model for determining the coupling between the multipole resonance probe and the plasma
Jan Kaiser, Sebastian Wilczek, Ralf Peter Brinkmann
WELTPP-19, December 1-2, 2016 at Rolduc, Kerkrade, the Netherlands
Measuring the plasma parameters has practical importance for controlling a plasma process. A tool for measuring the electron density is the multipole resonance probe (MRP). However, the physical presence of the MRP in the plasma influences the plasma process. In this work an iterative model for determining the coupling between the MRP and the plasma surface is introduced. The electron and ion physics are treated in two coupled models which are iterated until convergence is reached. First results for the potential for a given ion density distribution are presented.