An iterative model to study the coupling between the plasma and a floating surface

Jan Kaiser, Sebastian Wilczek, Ralf Peter Brinkmann

DPG Früh­jahrs­ta­gung 2017, Bremen, Ger­ma­ny, 13 March - 17 March


Abstract

Measuring plasma parameters (e.g. plasma density, electron temperature) has practical importance to control the plasma process. Common tools to determine these parameters are probes, such as the multipole resonance probe (MRP) or different types of Langmuir probes (LP). All kinds of active probes represent a floating surface which leads to the generation of a plasma sheath and, therefore, to a disturbance of the plasma dynamics in the region around the probe. In this work an iterative model to determine the coupling between the MRP and the plasma is presented. The MRP is modeled as a curved boundary with a fixed potential. The electron and ion physics are treated in two coupled models which are iterated until convergence is achieved. Results for the potential, the electron and ion densities in the region of the MRP are presented.

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