Mode analysis for a microwave driven plasma discharge: A comparison between an analytical model and numerical results

Daniel Szeremley, Marc Zimmermanns, Ilona Rolfes, Denis Eremin, Ralf Peter Brinkmann, Thomas Mussenbrock

WELT­PP-18, De­cem­ber 3-4, 2015 at Rol­duc, Kerk­ra­de, the Nether­lands

Tags: analyses;, comparison, microwave;, mode