Mode analysis for a microwave driven plasma discharge: A comparison between analytical and numerical results

Daniel Szeremley, Marc Zimmermanns, Ilona Rolfes, Thomas Mussenbrock, Ralf Peter Brinkmann, Denis Eremin

68th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence/9th In­ter­na­tio­nal Con­fe­rence on Re­ac­tive Plas­mas/33rd Sym­po­si­um on Plas­ma Pro­ces­sing, Ho­no­lu­lu, USA, Oc­to­ber 12-15 2015

Tags: analyses;, comparison, microwave;, mode