The Multipole Resonance Probe: Characterization of a Prototype

Martin Lapke, Jens Oberrath, Christian Schulz, Robert Storch, Tim Styrnoll, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Mussenbrock, Thomas Musch, Ilona Rolfes, Christian Zietz

Plasma Sources Science and Technology, Vol. 20, No. 4, 042001, 2011


Abstract

The multipole resonance probe (MRP) was recently proposed as an economical and industry compatible plasma diagnostic device [M. Lapke et al., Appl. Phys. Lett. 93, 051502 (2008)]. This manuscript reports the experimental characterization of a first MRP prototype in an inductively coupled argon/nitrogen plasma at 10 Pa. The behavior of the device follows the predictions of both an analytical model and a numerical simulation. The obtained electron densities are in excellent agreement with the results of Langmuir probe measurements.

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Tags: MRP, Multipolresonanzsonde