Nonlinear Electron Resonance Heating in Capacitive Discharges

Sebastian Wilczek, Jan Trieschmann, Denis Eremin, Ralf Peter Brinkmann, Julian Schulze, Derzsi, Aranka, Korolov, Ihor, Hartmann, Peter, Donkó, Zoltán, Thomas Mussenbrock

NCPST 5th Radio Frequency Discharges Workshop 2015, Dublin, Ireland, June 22-23 2015

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