Self-Excited Electron resonance Spectroskopy in Dual Frequency Capacitively Coupled Plasmas

Egmont Semmler, Peter Awakowicz, Dennis Ziegler, Thomas Mussenbrock, Ralf Peter Brinkmann

DPG Früh­jahrs­ta­gung, Augs­burg, Ger­ma­ny, 27-30 march

Tags: dual frequency, electron resonance spectroskopy, self-excited