Simulation of a inductively coupled hydrogen plasma for sterilization processes

Max Engelhardt, Benjamin Denis, Thomas Mussenbrock, Peter Awakowicz

63rd Annual Ga­se­ous Elec­tro­nics Con­fe­rence 2010, Paris, Fran­ce, 04-08 Oc­to­ber

Tags: inductively coupled hydrogen, Simulation, sterilization processes