course: Optical Metrology
- teaching methods:
- lecture with tutorials
- computer based presentation, black board and chalk
- responsible person:
- Priv.-Doz. Dr.-Ing. Nils C. Gerhardt
- Priv.-Doz. Dr.-Ing. Nils C. Gerhardt (ETIT), Dr.-Ing. Carsten Brenner (ETIT)
- offered in:
- summer term
dates in summer term
- kick-off meeting: Friday the 21.04.2017 in ID 03/419
- lecture Mondays: from 14:15 to 15.45 o'clock in ID 04/401
- tutorial Fridays: from 10:15 to 11.45 o'clock in ID 03/419
- tutorial (alternativ) Fridays: from 10:15 to 11.45 o'clock in ID 03/401
Date according to prior agreement with lecturer.
Exam registration: FlexNow
The students understand the physical functional principles of optical metrology. They have learned the characteristics and limits of optical metrology. Furthermore, they got to know the selection criteria of suitable optical measuring techniques for a given application.
Optical metrology is used as cross-sectional technology in many disciplines. At first, the basic characteristics of light and its interaction with matter are pointed out in a short fundamental chapter. Subsequently, the tools of optical metrology, i.e. active and passive optical elements are discussed. The main part of the lecture deals with measuring techniques like: geometry measurements, profilometry, shape measurements, spectroscopy, high-speed cameras, infrared imaging, and biophotonics.
Fundamental knowledge of electromagnetic waves and optics
- Saleh, , Teich, "Fundamentals of Photonics", Wiley & Sons, 2007