course: Optical Metrology

number:
148208
teaching methods:
lecture with tutorials
media:
computer based presentation, black board and chalk
responsible person:
Priv.-Doz. Dr.-Ing. Nils C. Gerhardt
lecturers:
Priv.-Doz. Dr.-Ing. Nils C. Gerhardt (ETIT), Dr.-Ing. Carsten Brenner (ETIT)
language:
english
HWS:
3
CP:
4
offered in:
summer term

dates

Please look up the dates in the central course catalog.

Exam

Oral

Date according to prior agreement with lecturer.

Duration: 30min
description of exam:

For LAP students: exam has to be taken as a combined module exam in the module Metrology.


goals

The students understand the physical functional principles of optical metrology. They have learned the characteristics and limits of optical metrology. Furthermore, they got to know the selection criteria of suitable optical measuring techniques for a given application.

content

Optical metrology is used as cross-sectional technology in many disciplines. At first, the basic characteristics of light and its interaction with matter are pointed out in a short fundamental chapter. Subsequently, the tools of optical metrology, i.e. active and passive optical elements are discussed. The main part of the lecture deals with measuring techniques like: geometry measurements, profilometry, shape measurements, spectroscopy, high-speed cameras, infrared imaging, and biophotonics.

requirements

none

recommended knowledge

Fundamental knowledge of electromagnetic waves and optics

literature

  1. Saleh, , Teich, "Fundamentals of Photonics", Wiley & Sons, 2007