course: Optical Metrology
- teaching methods:
- lecture with tutorials
- computer based presentation, black board and chalk
- responsible person:
- Priv.-Doz. Dr.-Ing. Nils C. Gerhardt
- Priv.-Doz. Dr.-Ing. Nils C. Gerhardt (ETIT), Dr.-Ing. Carsten Brenner (ETIT)
- offered in:
- summer term
Please look up the dates in the central course catalog.
Date according to prior agreement with lecturer.
|Form of exam:||oral|
|Registration for exam:||None|
|description of exam:|
For LAP students: exam has to be taken as a combined module exam in the module Metrology.
The students understand the physical functional principles of optical metrology. They have learned the characteristics and limits of optical metrology. Furthermore, they got to know the selection criteria of suitable optical measuring techniques for a given application.
Optical metrology is used as cross-sectional technology in many disciplines. At first, the basic characteristics of light and its interaction with matter are pointed out in a short fundamental chapter. Subsequently, the tools of optical metrology, i.e. active and passive optical elements are discussed. The main part of the lecture deals with measuring techniques like: geometry measurements, profilometry, shape measurements, spectroscopy, high-speed cameras, infrared imaging, and biophotonics.
Fundamental knowledge of electromagnetic waves and optics
- Saleh, , Teich, "Fundamentals of Photonics", Wiley & Sons, 2007